Overcoming Challenges in Reclaiming Wet Bench Rinse Waters Back into a UPW System

Date Published 2023 | Conference material

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This presentation addresses the challenge of reducing environmental footprint and ensuring a more sustainable future. The lessons learned in this presentation should inspire existing facility managers to look deeper into the sources of wastewater currently being discharged and reinforce some key requirements to improve water efficiency in the design of new fabs.

Authors: Stephen Witt, glen sundstrom,
Tags: Water ReclaimUPW recyclingWater Conservation

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