2022 IRDS & SEMI Standards Update

Date Published 2022 | Conference materials

Log in or Join UPM to access this content

To access our resources you will need to be a member of UPM, log in to your account or purchase a membership to view this content.

Already have an account? Log in

Enabling Advanced Semiconductor Yield via Proactive Technology Management - an overview of the IRDS research work and future roadmap, as well as SEMI standard and future focus areas.

Tags: SustainabilityParticle PrecursorsIRDSEnergy ConservationSEMIWater Conservation

Related content

Conference material | 2016
UPW ITRS and SEMI: Past – Present – Future of Enabling Advanced Existing and Future Technologies
Conference material | 2023
Optimization of the primary pure water system configuration and new operational control for enabling minimal energy consumption on ultrapure water producing systems
Conference material | 2022
Keynote panel: Facilities' Growth
Conference material | 2023
Suggestions of eco-friendly RO membrane operation (Focused on K-water’s RO plant )

Back to results

Not a UPM Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

Book a demo

Find out how you can leverage UPM Member Portal to achieve your business objectives today.

Request a demo