Online Monitoring of Traditional and Emerging Airborne Molecular Contaminants at pptv Concentrations

Date Published 2023 | Conference material

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Semiconductor manufacturing involves hundreds of independent processes. To ensure acceptable quality in high-throughput production environments, it is crucial that the monitoring for airborne molecular contaminants is done sensitively and comprehensively, including a diversity of known and unknown contaminants. Chemical ionization time-of-flight (CI-TOF) mass spectrometry allows for monitoring a customized compound list.

Organizations: Tofwerk
Authors: Carla Frege,
Tags: Airborne Molecular Contamination (AMC)PFASHigh purity gas systems

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