Welcome to NextGen UPM! Discover UPM resources in our new Technical Knowledge Base, or map the ultrapure water value chain using our updated EcoSystem! These pages are still in beta, we have some exciting updates and further functionality on the way, so watch this space.
Advancements in PTR-TOF Technology for Improved Real-Time AMC Monitoring
Date Published 2023 | Conference material
Log in or Join UPM to access this content
To access our resources you will need to be a member of UPM, log in to your account or purchase a membership to view this content
Already have an account? Log in
Airborne Molecular Contamination (AMC) is a major concern in clean production environments, including the semiconductor, pharmaceutical, and aerospace industries. In this study, the presenter highlights the benefits of real-time AMC monitoring solutions utilizing PTR-TOF technology and present recent advancements for this specific application.
Organizations: IONICON Analytik
Authors: Jens Herbig, Tags: Airborne Molecular Contamination (AMC)Semiconductors
Related content
UPW journal archive | 2016
How Can Preventative Maintenance of Filters Ensure the Highest Quality of UPW at Lowest Cost of Ownership?
Conference material | 2021
Quantum cascade laser cavity ring-down spectroscopy analyzers for PPT-level CO and CO2 detection
Conference material | 2021
Measurement of nanoparticles and their precursors
Conference material | 2023
High Purity Environments - Opening Panel 2023
Conference material | 2023
Online Monitoring of Traditional and Emerging Airborne Molecular Contaminants at pptv Concentrations
Conference material | 2022
Real time AMC monitoring with novel chemical ionization mass spectrometry at single digit pptv concentrations​
Back to results