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Energy and water use efficiency considerations in ultrapure and wastewater system design and operation for semiconductor fabs
Date Published 2023 | Conference material
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The paper will present KPIs and calculation methods to quantify environmental impact with regard to water treatment systems. Some of them are targeted on assessing the overall water management concept, others will be used to assess individual parts.
Authors: Andreas Neuber, Bob McIntosh,
Tags: UPW systemsWastewaterEnergy Conservation
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