Date Published 2023 | Conference material
To access our resources you will need to be a member of UPM, log in to your account or purchase a membership to view this content
In the semiconductor manufacturing process, a large amount of ultrapure water (UPW) is used in the cleaning operations performed before and after each process. In order to alleviate the shortage of limited water resources, the recovery and reuse of wastewater has been attracting attention.